JPH0447249U - - Google Patents
Info
- Publication number
- JPH0447249U JPH0447249U JP9099890U JP9099890U JPH0447249U JP H0447249 U JPH0447249 U JP H0447249U JP 9099890 U JP9099890 U JP 9099890U JP 9099890 U JP9099890 U JP 9099890U JP H0447249 U JPH0447249 U JP H0447249U
- Authority
- JP
- Japan
- Prior art keywords
- extraction electrode
- electrode system
- ions
- platen
- swinging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 claims 5
- 239000000284 extract Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9099890U JPH0447249U (en]) | 1990-08-29 | 1990-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9099890U JPH0447249U (en]) | 1990-08-29 | 1990-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0447249U true JPH0447249U (en]) | 1992-04-22 |
Family
ID=31826231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9099890U Pending JPH0447249U (en]) | 1990-08-29 | 1990-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0447249U (en]) |
-
1990
- 1990-08-29 JP JP9099890U patent/JPH0447249U/ja active Pending